Durmuş Ali ALDEMİR, Murat KALELİ, Ahmet Buğrahan BAYRAM, Celal Alp YAVRU

Ultrasonik Sprey Piroliz ile Üretilen Flor Katkılı Kalay Oksit İnce Filmlerin Yapısal, Morfolojik, Optiksel ve Elektriksel Analizleri

Bu çalışmada yüksek şeffaflığa sahip Flor katkılı Kalay Oksit ince filmleri ultrasonik sprey piroliz tekniği ile başarılı bir şekilde üretilmiştir. İnce filmlerin yapısal ve morfolojik karakterizasyonu için X-ışını kırınımı, taramalı elektron mikroskobu ve atomik kuvvet mikroskobu analizleri yapılmıştır. X-ışını kırınımı desenleri göstermiştir ki filmler polikristal haldedir ve (200) tercihli yönelimi boyunca büyümüşlerdir. 3,16 eV’luk bir band aralığı UV-Vis ölçümlerinden elde edilmiştir. İnce filmlerin öz direnci 1,35×10-3W-cm olarak bulunmuştur.

Anahtar Kelimeler:

Flor katkılı Kalay Oksit, Ultrasonik sprey piroliz, Fiziksel özellikler

Structural, Morphological, Optical and Electrical Analysis of Fluorine Doped Tin Oxide Thin Films Fabricated by Ultrasonic Spray Pyrolysis

In this study, Fluorine doped Tin Oxide (FTO) thin films with high transparency were fabricated by ultrasonic spray pyrolysis technique, successfully. The analyses of X-ray diffraction, scanning electron microscopy and atomic force microscopy were used for the structural and morphological characterization of the thin films. X-ray diffraction patterns showed that the films were polycrystalline and grow along to preferred orientation of (200). The band gap value of 3.16 eV was obtained from UV-Vis measurements. The resistivity of the thin films was found to be as 1.35×10-3W-cm.

Keywords:

Fluorine doped Tin Oxide, Ultrasonic Spray Pyrolysis, Physical properties,

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